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Air quality measurements: New manufacturing method for nano gas sensors opens doors

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Nano-sized gas sensors in mobile telephones that measure the atmospheric humidity are nothing new as such. However, so far it was necessary to rely on complex lithographic methods to produce the required nano-structure of the sensors, and they have the added disadvantage that they do not work well on uneven surfaces. A relatively new approach is the focussed electron beam deposition method – FEBID for short – in which the nano-structures can be "written directly" without requiring any pre- or after-treatment.

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